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UV/O3 cleaner; UV ozone cleaner
UV-1 is a research and development cleaning device designed to efficiently perform complete dry processing of various semiconductor processes, such as photoresist ashing, silicon wafer cleaning, and chrome mask cleaning, through the interaction of high-concentration ozone and ultraviolet irradiation.
UV/O3 cleaner; UV ozone cleaner
The UV-300 is a cleaning device developed to efficiently perform complete dry processing of various semiconductor processes, such as photoresist ashing, silicon wafer cleaning, and chrome mask cleaning, through the interaction of high-concentration ozone and ultraviolet irradiation.
UV/O3 Cleaner - UV Ozone Cleaner
The UV-300H is a cleaning device developed to efficiently perform complete dry processing of various semiconductor processes such as photoresist ashing, silicon wafer cleaning, and chrome mask cleaning through the interaction of high-concentration ozone and ultraviolet irradiation. This device enables faster processing compared to conventional UV/O3 treatment.
Removal of organic pollutants with the double effect of ultraviolet light and ozone from two wavelengths!
The "UV Ozone Cleaner" is a damage-free dry cleaning method that can remove organic contaminants adhering to substrates through a photochemical oxidation decomposition process. It features a reliable sealed structure that can maintain a pressurized state of 0.02 MPa inside the cleaning chamber. Additionally, by connecting to the standard ozone killer (ozone decomposition device) equipped in other models, it prevents ozone leakage to the outside. 【Features】 ■ Easily removes organic contaminants on substrates that could not be removed by ultrasonic cleaning alone ■ Removes organic solvents used in wet cleaning ■ Capable of removing organic contaminants without damaging the substrate surface ■ Facilitates the formation of thin films ■ A dry cleaning device that can be used at atmospheric pressure without the need for a vacuum device *For more details, please refer to the PDF materials or feel free to contact us.
We offer rental of UV ozone cleaners for equipment introduction consideration.
We offer rental of small UV cleaning devices. There are unique benefits to renting, such as: - Wanting to use it temporarily for short-term research. - Wanting to thoroughly test the cleaning and modification effects in-house without purchasing. - Unlike purchasing, expenses can be processed, making internal approval relatively easy. - No need for payment of property tax or administrative processing for depreciation.
